One of the greatest challenges in SEM-based microanalysis is managing interfering X-ray lines. We review the quantitative analysis of a Ti-V-Al-Fe sample consisting of two phases with only small differences in V and Fe content. We cover a number of possible techniques to resolve X-ray lines line separated by only 17 eV. Neither EDS alone, nor WDS, could solve this problem.
Run time: 30 mins
Recording date: 4/8/2014